http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010229029-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-1484 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B8-04 |
| filingDate | 2010-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e203b5a44b5f370d39ad2f4eb3ef932 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_585bf1477207b006e27e4e81ddc2a4a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b299bd19b4744fb2c228f51fb7e227ea |
| publicationDate | 2010-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010229029-A |
| titleOfInvention | Synthetic quartz glass ingot and method for producing synthetic quartz glass member |
| abstract | In producing a synthetic quartz glass ingot by a direct method in which silica raw material compound is vapor-phase hydrolyzed or oxidatively decomposed by a flame formed by a burner to deposit silica fine particles on a target and melt vitrify. In the method of growing the ingot by moving the target forward and backward, (ii) while continuously supplying a fixed amount of the silica raw material compound, (ii) the entire growth surface is always irradiated with the flame, and (iii) the target (Iv) A method for producing a synthetic quartz glass ingot, characterized in that a synthetic quartz glass ingot is obtained by periodically repeating the forward and backward movements at a predetermined time, a predetermined speed, and a predetermined growth rate, and (iv) maintaining the ingot growth shape constant. . [Effect] For example, a low striae synthetic quartz glass member for a large synthetic quartz glass substrate used for a large photomask for liquid crystal display and a method for producing a synthetic quartz glass ingot for obtaining the same. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9284213-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013133277-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7060386-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018184335-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018198774-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014514236-A |
| priorityDate | 2010-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.