http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010228277-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045
filingDate 2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18a58893cf683e9b4e62539fa8f90b17
publicationDate 2010-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010228277-A
titleOfInvention Liquid ejecting head, liquid ejecting apparatus, actuator device, and method of manufacturing liquid ejecting head
abstract Provided are a liquid ejecting head, a liquid ejecting apparatus, an actuator device, and a method for manufacturing the liquid ejecting head, which can reduce destruction such as peeling of a zirconium oxide layer and destruction of a pressure generating element. A first layer 50 mainly composed of silicon oxide formed above a substrate 10 and a second layer mainly composed of zirconium oxide formed on the first layer 50 by a vapor deposition method. Formed above the third layer 56, the third layer 57 mainly composed of zirconium oxide formed by applying and baking the coating liquid on the second layer 56. A pressure generating element 300. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014176985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014240152-A
priorityDate 2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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