http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010228277-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 |
filingDate | 2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18a58893cf683e9b4e62539fa8f90b17 |
publicationDate | 2010-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2010228277-A |
titleOfInvention | Liquid ejecting head, liquid ejecting apparatus, actuator device, and method of manufacturing liquid ejecting head |
abstract | Provided are a liquid ejecting head, a liquid ejecting apparatus, an actuator device, and a method for manufacturing the liquid ejecting head, which can reduce destruction such as peeling of a zirconium oxide layer and destruction of a pressure generating element. A first layer 50 mainly composed of silicon oxide formed above a substrate 10 and a second layer mainly composed of zirconium oxide formed on the first layer 50 by a vapor deposition method. Formed above the third layer 56, the third layer 57 mainly composed of zirconium oxide formed by applying and baking the coating liquid on the second layer 56. A pressure generating element 300. [Selection] Figure 2 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014176985-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014240152-A |
priorityDate | 2009-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.