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filingDate 2009-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010214654-A
titleOfInvention Liquid repellent treatment method, nozzle plate, ink jet head, and electronic device
abstract An object of the present invention is to perform a liquid repellent treatment uniformly on a surface of a substrate having holes. A liquid repellent treatment method for imparting liquid repellency to a surface of a substrate having a hole, comprising: forming an organic film on the surface of the substrate and an inner wall surface of the hole; A protective member forming step for forming a protective member on the organic film on the surface of the material, an organic film removing step for removing the organic film on the inner wall surface of the hole of the base material, and the protection on the organic film on the surface of the base material Solving the problem by providing a liquid repellent treatment method comprising: a protective member removing step for removing a member; and a fluorination treatment step for fluorinating an organic film on the surface of the substrate. To do. [Selection] Figure 5
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017185748-A
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Total number of triples: 42.