http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010209158-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 |
| filingDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fbf458bd4553d5cce4ca36fa11d34b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ea7064b0e77a911f6105184016b0ef1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e0f80efe46fa0d06133e4c447dd9394 |
| publicationDate | 2010-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010209158-A |
| titleOfInvention | Adhesive sheet and semiconductor wafer processing method using the same |
| abstract | In a process of processing a semiconductor wafer subjected to patterning, an adhesive sheet that can protect the patterning by being bonded to the surface of the semiconductor wafer, even if the wafer to which the adhesive sheet is attached is extremely thin ground The present invention provides an adhesive sheet that does not cause “warping” or “cracking” on a wafer when exposed to high temperatures. The pressure-sensitive adhesive sheet of the present invention has a heat-shrinkable film layer, a heat-expandable film layer, and a pressure-sensitive adhesive layer having a heat shrinkage rate in the main shrinkage direction of 5% or more and less than 30% at a predetermined temperature in the range of 70 to 180 ° C. And at least an agent layer. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10054856-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012069794-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019047075-A |
| priorityDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 122.