| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a9982b1666c54b5bf02d6c944891e4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-0833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2010-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1deb1b1cd33744e4754bbfdedbc4a4fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d29b755b1a3321641e4c868ea2fc750
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_727c4a7042eb978d4208a8ab178085e9 |
| publicationDate |
2010-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010196168-A |
| titleOfInvention |
Wide angle high reflection mirror at 193nm |
| abstract |
PROBLEM TO BE SOLVED: To provide a suitable high / low refractive index coating system for improving the performance of a high reflection optical element. An optical element comprising a selected substrate and an amorphous coating of the formula (H o L o ) i H o on the substrate, wherein (H o L o ) i is on the substrate A plurality of i-coating laminates consisting of a H o layer and a L o layer, i in the range of 14-20, H o is amorphous MgAl 2 O 4 , and L o is amorphous a SiO 2, thereby the amorphous MgAl 2 O 4 -SiO 2 coating was formed on a substrate, H o layer of the first period is in contact with the substrate, the thickness of the period of i is 600nm To 1200 nm. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017510835-A |
| priorityDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |