| abstract |
A micro movable element suitable for suppressing rotational displacement of a movable part that performs translational displacement operation during driving, and an optical interferometer including such a micro movable element are provided. A micro movable element X1 of the present invention includes a movable portion 10, a fixed portion 20, and connecting portions 31 to 34. The movable part 10 has a pair of electrode parts 12 and 13. The fixed portion 20 includes a pair of electrode portions 22 and 23 for generating a driving force for translational displacement of the movable portion 10 in a direction crossing the separation direction of the electrode portions 12 and 13 in cooperation with the electrode portions 12 and 13. Have. Each of the plurality of connecting portions 31 to 34 is connected to the movable portion 10 and connected to the fixed portion 20. The electrode portions 12 and 13 are within the connection portions P1 and P3 in the separation direction between the connecting portion P1 to which the connecting portion 31 and the movable portion 10 are connected and the connecting portion P3 to which the connecting portion 33 and the movable portion 10 are connected. To position. [Selection] Figure 8 |