http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010184196-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 |
| filingDate | 2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a984cd7e35004a1317af8ded70e7010 |
| publicationDate | 2010-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010184196-A |
| titleOfInvention | Thin film formation method, alignment film formation method |
| abstract | A thin film forming method and an alignment film forming method capable of stably forming a thin film with little coating unevenness by applying a liquid to the surface of a substrate. A thin film forming method according to this application example scans an ejection head 50 having a nozzle row 52c composed of a plurality of nozzles relative to a mother substrate 110, and a liquid material containing a functional material from the nozzles. A first application step for discharging and applying at least the film forming area AE on the mother substrate 110, a first drying step for drying the applied liquid material, and a scanning direction different from the scanning direction in the first application step. A second application step in which the mother substrate 110 and the ejection head 50 are relatively scanned, and a liquid material is ejected from the nozzle and applied to at least the film formation region AE; and a second drying step in which the applied liquid material is dried. , With. [Selection] Figure 7 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103995397-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013133231-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016106247-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10114240-B2 |
| priorityDate | 2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.