| abstract |
Disclosed is a method for producing polycrystalline silicon in which a polycrystalline silicon rod can be easily taken out and productivity is improved. A U-shaped silicon core member having both ends connected to the electrode is disposed in a bell jar standing on a bottom wall substrate to which at least a pair of electrodes are attached. In a method for producing polycrystalline silicon in which a silicon rod is formed by depositing silicon on the silicon core material by chemical vapor deposition with at least silane gas supplied while energizing the material, a bell jar of the produced polycrystalline silicon rod Prior to taking out from the inside, the electrode bonded to the polycrystalline silicon rod is cooled, and thereafter, the polycrystalline silicon rod is broken near the root and taken out from the electrode. To do. [Selection] Figure 1 |