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filingDate 2009-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fdddc13236fefbcf9433cab71261f27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2cbaa9fef0bd8ec66e14cb425cfb01
publicationDate 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010175893-A
titleOfInvention Resist composition and pattern forming method using the resist composition
abstract A resist composition excellent in sensitivity, stability over time, resolution, roughness characteristics, pattern shape and outgas characteristics, and a pattern forming method using the resist composition. (A) A resist composition comprising a diaryliodonium salt having three or more electron-donating groups in total on an aryl ring. [Selection figure] None
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