http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010174378-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_118b70392921838b134daba3ceb26430 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58 |
| filingDate | 2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60b67c3204eb339fce9e01a3ac289aef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46967246ed2250dc14b10f1244a33721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f988b0f020a0d7b14fd98d63aca43cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13cf2ea4d814b5cc854be25f8093683c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e275e1ebf0765195e8a0ec0d6290e310 |
| publicationDate | 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010174378-A |
| titleOfInvention | Thin film formation method |
| abstract | Provided is a thin film forming method capable of forming a film by generating stable plasma with high efficiency. A thin film forming method using a thin film forming apparatus comprising: a vacuum vessel 11 that maintains a vacuum inside; and plasma generating means that is connected to the vacuum vessel and generates plasma in an antenna housing chamber 80A. In the thin film forming method, the inside of the vacuum vessel is evacuated and the inside of the antenna accommodating chamber is decompressed to a vacuum state lower than the vacuum vessel to 10 −3 Pa or less, and a high frequency voltage is applied to the antenna 85a. And applying plasma to generate a plasma inside the vacuum vessel and plasma-treating the thin film formed in the vacuum vessel. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7341584-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7335495-B2 |
| priorityDate | 2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.