http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010174375-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097 |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23C5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B27-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C16-00 |
filingDate | 2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a584faa8497855d31b3e7d3ac54f12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce20033c518a71fdef3a54890bbb9ef4 |
publicationDate | 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2010174375-A |
titleOfInvention | Hard coating and sputtering target material for forming hard coating |
abstract | PROBLEM TO BE SOLVED: To provide a hard coating superior in wear resistance to TiN coating and TiAlN coating, which are conventional hard coatings, and a sputtering target material for forming the hard coating. A [1] (Zr 1-ab , Hf a, M b) (C 1-x N x) consisting of hard coating (where, M is W, 1 or more Mo) a, 0 ≦ 1−a−b, 0 ≦ a, 0.03 ≦ b ≦ 0.35, and 0 ≦ x ≦ 1, a hard film characterized by satisfying [2] (Zr 1-abc , Hf a , M b , D c ) (C 1-x N x ) hard film (where D is one or more of Si and B), and 0 ≦ 1-ab, 0 ≦ a, 0.03 ≦ b ≦ Hard film etc. characterized by satisfying 0.35, 0.03 ≦ c ≦ 0.3, 0 ≦ x ≦ 1. In the above formula, a represents the atomic ratio of Hf, b represents the atomic ratio of M, c represents the atomic ratio of D, and x represents the atomic ratio of N. [Selection figure] None |
priorityDate | 2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.