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filingDate 2009-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010160136-A
titleOfInvention Inspection apparatus and inspection method
abstract PROBLEM TO BE SOLVED: To inspect an object using an expansion coefficient having a relatively small amount of data (for example, identification and imaging of the object). SOLUTION: A conversion means 14 for wavelet transforming a time waveform of the terahertz wave obtained by using the terahertz wave detected by the detection means 13 is provided. Further, a selection means 15 is provided for selecting a second expansion coefficient stored in advance and included in the first expansion coefficient from the first expansion coefficient in the wavelet transform. Then, comparison means 16 is provided for comparing the first value in the second expansion coefficient with the second value in the second expansion coefficient selected by the selection means 15. [Selection] Figure 1
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