| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-1406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 |
| filingDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d21d1bfae07f7ac67bac91adc7c1f4e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ccab412d6c6f2d55be8488697ffbcbf |
| publicationDate |
2010-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010158664-A |
| titleOfInvention |
Methods for removing chlorine trifluoride |
| abstract |
An object of the present invention is to provide a detoxification method capable of suppressing the generation of ClO 3 F, a hardly decomposable substance, when a gas mixture containing ClF 3 and F 2 is detoxified by a wet scrubber. In a stage prior to detoxification of a mixed gas containing ClF 3 and F 2 by a wet scrubber, a heating reaction section is provided, and halogen gas is added to the mixed gas, whereby unreacted fluorine gas is halogenated. It is used to react with gas and to greatly reduce unreacted fluorine gas. [Selection] Figure 1 |
| priorityDate |
2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |