http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010153853-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0104 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2009-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d10c066f8f78607802c47b4467619242 |
| publicationDate | 2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010153853-A |
| titleOfInvention | Chemical mechanical polishing composition and method related thereto |
| abstract | A chemical mechanical polishing composition for polishing a substrate having a barrier material in the presence of copper and a low-k insulating material has a higher barrier material removal rate with advantageous selectivity over other materials on the substrate. I will provide a. Water: Abrasive grains having an average particle size of 100 nm or less 1 to 40% by weight; Quaternary compound 0.001 to 5% by weight; Formula (I): Wherein R is selected from C 2 -C 20 alkyl, C 2 -C 20 aryl, C 2 -C 20 aralkyl and C 2 -C 20 alkaryl; x is an integer 0-20; y is And a barrier material in the presence of at least one wiring metal and low-k insulating material using a chemical mechanical polishing composition that includes a material represented by the integer 0-20; x + y ≧ 1); A method of chemically mechanically polishing a substrate containing [Selection figure] None |
| priorityDate | 2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 106.