http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010153410-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6572309f22e2ad56c1390a78ac237bed |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2008-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d99da24b56f9f546b7837a1062fcdafc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e444ca39c9841e8147e24805f6d6c34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffa6ddfcb1f0ca30504610e8fea6cc10 |
| publicationDate | 2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010153410-A |
| titleOfInvention | Substrate holder and semiconductor wafer processing method |
| abstract | The present invention provides a simple substrate holder and a semiconductor wafer processing method that secure a flat work area and contribute to safe processing and flat correction. A grip frame 10 for holding a self-adhesive layer 2 for a semiconductor wafer 1 and a processing support stage 20 fitted to the grip frame 10 are provided, facing the self-adhesion layer 2 of the processing support stage 20. The surface 21 is formed flat, and an endless fitting groove 22 into which the grip frame 10 is fitted is drilled in the peripheral portion of the surface 21. Since the flat surface 21 of the processing support stage 20 functions as a work area for the semiconductor wafer 1, even if the semiconductor wafer 1 is thinned to 100 μm or less and easily broken, the semiconductor wafer 1 can be processed safely. . Even when the semiconductor wafer 1 is warped in a bow, it can be corrected to a flat shape by using the flat surface 21. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020009873-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013004666-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019184751-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012059749-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013191756-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9406542-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I563551-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6374132-B1 |
| priorityDate | 2008-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.