http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010150129-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G51-02 |
| filingDate | 2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65f39b6578735b7cc9dad03b458d4a3b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51b9842b268518ce4b1f4132273b83e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93b01bcb5396d87eab38a2b1c71b117a |
| publicationDate | 2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010150129-A |
| titleOfInvention | Cobalt carbonyl complex containing container and cobalt film forming method |
| abstract | A container containing a cobalt carbonyl complex capable of stably storing the cobalt carbonyl complex is provided. The container containing a cobalt carbonyl complex is a container containing a cobalt carbonyl complex and a gas, and the gas contains carbon monoxide. The container preferably has a container main body and a gas inlet and a gas outlet provided in the container body, and the container of this aspect is a cobalt for forming a cobalt film on a substrate by heating the container. Sublimation of the carbonyl complex can be performed from within the vessel. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012172251-A |
| priorityDate | 2008-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.