| abstract |
A system and method for detecting the end of a polishing step in electropolishing. An electropolishing system has a power source configured to deliver current through the electrolyte. A polishing end point is determined by monitoring signal characteristics of an electric signal supplied by the power source. For example, monitoring signal characteristics include current and voltage. In another embodiment, the current is related to the amount of material removed by polishing, and the total amount of material removed by polishing can be determined by monitoring the current over time. [Selection] Figure 3 |