http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010143114-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate | 2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_537bc99d38cb4ebf98fa1891f7f969bd |
| publicationDate | 2010-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010143114-A |
| titleOfInvention | Manufacturing method of substrate for liquid discharge head |
| abstract | An object of the present invention is to provide a method for manufacturing a substrate for a liquid discharge head, which has a thin protective layer and can suppress the occurrence of defects in the protective layer due to thermal stress. A conductor layer formed on a substrate, an insulating layer provided on the substrate and the conductor layer, a side surface in contact with the insulating layer, an electrode portion provided on the conductor layer, and the insulating layer And a heating layer having a heating resistor layer formed on a common flat surface of the electrode portion and a protective layer laminated on the heating resistor layer and the insulating layer. Forming a through hole corresponding to the electrode portion in the insulating layer, filling the through hole with the material of the electrode portion and covering the surface of the insulating layer, and then mechanically polishing or CMP the method. A method for manufacturing a substrate for a liquid discharge head, comprising polishing so that an insulating layer and a surface of the electrode portion are flush with each other. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016198908-A |
| priorityDate | 2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.