http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010142902-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 |
| filingDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f4d60f746d3b9833ee166cd2e4d8b4 |
| publicationDate | 2010-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010142902-A |
| titleOfInvention | Substrate manufacturing method |
| abstract | Provided is a substrate manufacturing method in which a main body substrate to which an auxiliary substrate is attached is accurately positioned at a predetermined position to manufacture the substrate. In the substrate manufacturing method of the present invention, first, a pattern is formed on the surface side of a main substrate 1 and an alignment mark 7 is formed. Then, the auxiliary substrate 9 is bonded to the surface side of the main body substrate 1. Then, in a state where the formed alignment mark 7 and the mask 15 are positioned, the back surface side of the main substrate 1 is exposed through the mask 15 to form a pattern on the back surface side of the main substrate 1. When the pattern is formed on the back side of the main substrate 1, the auxiliary substrate 9 is peeled from the main substrate 1. [Selection] Figure 6 |
| priorityDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.