http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010134311-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32 |
| filingDate | 2008-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e64ab15c78a6d59ff256bf90e586d03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2e97d79b8a7b5cd4485ec58cf921ad6 |
| publicationDate | 2010-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010134311-A |
| titleOfInvention | Radiation-sensitive resin composition, interlayer insulating film and microlens, and production method thereof |
| abstract | An object of the present invention is to form an interlayer insulating film having high sensitivity to radiation, adhesion, high heat resistance, resolution, high transmittance, and high reliability, and high transmittance when used for forming a microlens. An object of the present invention is to provide a radiation-sensitive resin composition that can form a microlens having a high melt rate and a good melt shape and is excellent in storage stability. The present invention relates to a radiation-sensitive resin composition comprising (A) a copolymer and (B) a 1,2-quinonediazide compound, wherein (A) the copolymer is (a1) unsaturated. Produced through a step of polymerizing a monomer containing a carboxylic acid and / or an unsaturated carboxylic acid anhydride and (a2) an epoxy group-containing unsaturated compound in the presence of a compound represented by the following formula (1). This is achieved by a radiation sensitive resin composition containing a copolymer. [Chemical 1] In [Equation (1), Z 1 and Z 2 is an alkyl group or an optionally substituted benzyl group having 4 to 18 carbon atoms independently of one another. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10067422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016031580-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013025203-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010139790-A |
| priorityDate | 2008-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 351.