| abstract |
Radiation-sensitive resin and resin composition having not only excellent resolution performance but also low LWR, good PEB temperature dependency, excellent pattern collapse resistance, and low defect, that is, excellent defectivity Offer things. (A) a copolymer resin (A) of an alcohol (meth) acrylate having a heterocyclic ring in which a norbornane ring and a lactone ring are condensed, and a (meth) acrylate ester of an alcohol having a cyclopentane ring, and the resin A radiation-sensitive resin composition containing a radiation-sensitive acid generator (B). [Selection figure] None |