http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010113035-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F18-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F28-02 |
| filingDate | 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7f67baedbda30c23df85a537e776cbc |
| publicationDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010113035-A |
| titleOfInvention | Polymer for lower layer film, composition for lower layer film, and method for producing semiconductor |
| abstract | An object of the present invention is to effectively prevent reflection during exposure and to form a film having a smooth surface even when applied on a stepped substrate, and to suppress intermixing with a resist applied to an upper layer, Furthermore, the polymer for lower layer films | membranes from which an exposure part can be easily removed with an alkali developing solution are provided. A polymer for an underlayer film includes at least one repeating structural unit in which two or more polymer chains are bonded with a linking group containing a functional group cleavable by the action of an acid and has a light absorbing group. It consists of a crosslinked polymer. In this polymer for an underlayer film, the functional group that can be cleaved by the action of an acid preferably has an acetal structure. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022039082-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7349887-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012518812-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010285403-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9086627-B2 |
| priorityDate | 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 449.