http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010105825-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0837
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-083
filingDate 2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d21d1bfae07f7ac67bac91adc7c1f4e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d8c6b05060d1918adcf96d0c888773e
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publicationDate 2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010105825-A
titleOfInvention Method for purifying nitrogen trifluoride containing halogen or halogen compounds as impurities
abstract PROBLEM TO BE SOLVED: To provide a method for purifying nitrogen trifluoride containing halogen gas or halogen compound as an impurity at low cost as an impurity in a gas. In a method for purifying nitrogen trifluoride containing halogen or a halogen compound as an impurity, a step of bringing the nitrogen trifluoride into contact with water, a step of contacting with a base aqueous solution, and a step of contacting with a reducing agent aqueous solution. A method for purifying nitrogen trifluoride is used, which is characterized by comprising: [Selection] Figure 1
priorityDate 2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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