| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b3c9a3665700c15b2fea4f9202b46cc |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-16 |
| filingDate |
2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caf1281aec337d3f97c8f6da415c9eca |
| publicationDate |
2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010105016-A |
| titleOfInvention |
Laser processing method and laser processing apparatus |
| abstract |
The present invention provides a laser half processing method and apparatus capable of reducing the problem of contamination of a focus lens and a workpiece caused by a vaporized gas generated when laser half-cutting a resin film. [Solution] When a part of the film in the thickness direction is removed by condensing and irradiating a laser beam on a film with a resin layer on the electromagnetic wave shielding layer, a laser is passed around the optical path of the laser beam that has passed through the lens. Covered with a casing with a light irradiation port, the irradiation port is separated from the film by at least 10 mm, and the vaporized gas is exhausted outside the casing while supplying air to the inside of the casing. The pressure is set to +0.02 MPa to +0.05 MPa with respect to the pressure of the arranged atmosphere. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020528039-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014226671-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018043253-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012042817-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7330449-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012068563-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016054261-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103124929-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11052639-B2 |
| priorityDate |
2008-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |