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publicationDate 2010-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010089054-A
titleOfInvention Processing apparatus and processing method
abstract Disclosed is a treatment technique capable of efficiently removing a hardly decomposable compound contained in a gas. A lower processing tank 22 into which a PFC gas 81 containing a hardly decomposable compound is introduced, a nanobubble-containing water discharge section 54 for discharging nanobubble-containing water into the lower processing tank 22, and the lower processing tank 22 In order to treat a gas containing a hardly decomposable compound, comprising an upper treatment tank 21 into which the first decomposition product mixed gas generated in step 1 is introduced and a calcium-containing material disposed in the upper treatment tank 21. A processing apparatus is provided. [Selection] Figure 1
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