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filingDate 2008-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010087085-A
titleOfInvention Electronic component built-in substrate and manufacturing method thereof
abstract An electronic component capable of preventing deformation of an insulating layer and a substrate due to a stress of a vaporizing component that may occur during manufacturing or operation, and capable of realizing stable operation even when the electronic component has a high operating frequency. Provided are an embedded substrate and a method for manufacturing the same. A semiconductor-embedded substrate 1 that is an electronic component-embedded substrate has resin layers 20 and 21 laminated on a conductor layer 12a provided on a support base 11 of a double-sided CCL 10, and the conductor layer 12a inside the resin layer 20a is laminated. The carbon nanotube sheet S and the semiconductor device 30 are built in this order at opposing positions. A through hole T2 is formed in the resin layer 21, and an end portion St of the carbon nanotube sheet S is exposed inside the resin layer 21. The through hole T2 is filled with a resin layer 22 having a density lower than that of the resin layers 20 and 21, and the end portion St of the carbon nanotube sheet S and the resin layer 22 are in contact with each other. [Selection] Figure 3
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