http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010082044-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61H39-00 |
| filingDate | 2008-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee849a4db60f0011b233b24e3628bf9 |
| publicationDate | 2010-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010082044-A |
| titleOfInvention | Germanium deposition sheet |
| abstract | Disclosed is a germanium vapor-deposited sheet having excellent adhesion and water resistance between a base sheet and a germanium vapor-deposited layer. A germanium vapor deposition layer having a hydrogen atom content of 1 to 20 atomic% is formed on a base sheet. The germanium vapor deposition layer can be formed by plasma enhanced chemical vapor deposition using germanium hydride as a supply source. Since the germanium vapor deposition film contains hydrogen atoms, resistance to oxidative degradation is improved. [Selection] Figure 1 |
| priorityDate | 2008-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.