http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010080951-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c796e17354db11a7060fa39fa550add7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac700cbf3bda8eeb00cf1515a60a3ae2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7502fe6947ffe3e095c9ab84ed48cac0 |
| publicationDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010080951-A |
| titleOfInvention | Electrostatic chuck and manufacturing method thereof |
| abstract | The present invention relates to a corrosion-resistant member and a method of manufacturing the same, and provides an electrostatic chuck having a strong adsorption force using a Johnsen-Rahbek force made of a ceramic member having high corrosion resistance and low volume resistivity. In one embodiment of the present invention, an electrostatic chuck made of a ceramic member containing yttrium oxide as a main component and containing a cerium element and obtained by firing in a non-oxidizing atmosphere is provided. It is possible to provide an electrostatic chuck having a strong attracting force utilizing the Johnsen-Rahbek force made of a ceramic member having characteristics and a low volume resistivity. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102453117-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018186209-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180120588-A |
| priorityDate | 2008-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.