http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010080680-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_efbfdc7316d3b1b7ceaee5366a61b6e0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K83-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K35-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_727a46879f85e9bdc334df6450cb2f28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c411a43a00af0ce1f8a6aa1c6ab6583 |
| publicationDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010080680-A |
| titleOfInvention | Method for forming concave / convex pattern and apparatus for manufacturing concave / convex pattern |
| abstract | PROBLEM TO BE SOLVED: To provide a nanoimprint process method useful for manufacturing an electronic device, an optical component, a recording medium, etc., and having a concavo-convex pattern capable of manufacturing a product having such a fine pattern at low cost and at high speed Providing a forming method. The step of placing and pressing the surface of a stamper having a fine concavo-convex pattern on a transfer layer of a photocurable transfer sheet to form a laminate; A step of obtaining an intermediate stamper having a fine reverse concavo-convex pattern on the surface of the transfer layer by curing by irradiation and then removing the stamper; the surface of the reverse concavo-convex pattern of the intermediate stamper is used as a transfer layer of the photocurable transfer sheet Placing and pressing to form a laminate; and curing the transfer layer of the laminate having an intermediate stamper by UV irradiation, and then removing the intermediate stamper to remove the intermediate stamper on the surface of the transfer layer. And a step of obtaining a photocurable transfer sheet having an uneven pattern. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016043244-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012148481-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9914261-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014144641-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015004994-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014046579-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013131629-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110392919-A |
| priorityDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 320.