http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010077468-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-02 |
| filingDate | 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_050440a29423592d516e200f9e73e692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51b9842b268518ce4b1f4132273b83e2 |
| publicationDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010077468-A |
| titleOfInvention | Ruthenium film forming composition and ruthenium film forming method |
| abstract | PROBLEM TO BE SOLVED: To provide a composition for forming a ruthenium film by a simple and inexpensive coating method and a method for forming a ruthenium film by coating using the composition. [Solution] For forming a ruthenium film, comprising a ruthenium compound such as tetra (μ-trifluoroacetato) di (acetone) diruthenium, tetra (μ-pentafluoropropionato) di (acetone) diruthenium, and a solvent. A ruthenium film forming method, comprising: applying a ruthenium film-forming composition onto a substrate; and then heating and / or irradiating the substrate to form a ruthenium film on the substrate. [Selection figure] None |
| priorityDate | 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 138.