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filingDate 2009-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81d2b0be036e532f16663412163e762b
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publicationDate 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010077012-A
titleOfInvention Aluminum oxide sintered body and method for producing the same
abstract An aluminum oxide sintered body that can be adjusted to an intermediate volume resistivity between the Coulomb type and the Johnson-Rahbek type and has excellent corrosion resistance. The aluminum oxide sintered body of the present invention has a layer containing a phase containing rare earth elements and fluorine between particles of aluminum oxide as a main component, or aluminum oxide as a main component. A phase containing rare earth elements and fluorine exists along the edges of the particles. In this aluminum oxide sintered body, when a SEM image is viewed, a phase containing a rare earth element and a fluorine element is not locally present between aluminum oxide particles, but a line segment is formed. It exists as it is. The sintered aluminum oxide of the present invention has a volume resistivity of 1 × 10 13 to 1 × 10 16 Ω · cm calculated from a current value after 1 minute has passed by applying a voltage of 2 kV / mm at room temperature. Can be easily adjusted to the range. [Selection] Figure 1
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