http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010075925-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-00 |
filingDate | 2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a942c5bbdc2742a2ccc0d45f8b490439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_878f969c7ffb26859a2db799b7d44dc5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18bf94f1dbf5ff6143a1695c9770ec26 |
publicationDate | 2010-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2010075925-A |
titleOfInvention | Pattern formation method |
abstract | A pattern forming technique using a reel-to-reel method and a droplet discharge method is established. Another object is to reduce the cost of electronic equipment by mass production. A system for forming a pattern on a belt-like substrate by a reel-to-reel method, a droplet discharge device 20 for disposing a liquid material on the belt-like substrate 11 by a droplet discharge method, and processing of the droplet discharge device 20 And an atmospheric pressure control device 22 for controlling the atmospheric pressure higher than that of the adjacent space. The adjacent space may include a space for performing heat treatment or light treatment on the liquid material film. [Selection] Figure 2 |
priorityDate | 2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.