abstract |
An optical waveguide manufacturing method capable of efficiently manufacturing an optical waveguide having good bending resistance and good optical characteristics using a dry film. (A) a step of curing a lower clad layer forming resin film to form a lower clad layer; (B) laminating a core layer forming resin film on the lower clad layer; A step of forming, (C) a step of exposing and developing the core layer to form a core pattern 50 of the optical waveguide, (D) a step of laminating a resin film for forming an upper cladding layer on the core pattern and the lower cladding layer, and E) A method of manufacturing an optical waveguide including a step of curing an upper clad layer forming resin film to form an upper clad layer 60, wherein the upper clad layer forming resin film and the clad layer forming film 12 are low in elasticity. This is a method for manufacturing an optical waveguide, which is a composite resin film in which layer forming films 22 are laminated. [Selection] Figure 3 |