http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010068132-A

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publicationDate 2010-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010068132-A
titleOfInvention Filter, duplexer, and communication device
abstract In a filter using a piezoelectric thin film resonator, it is possible to reduce the size without impairing the mechanical strength of an electrode having a hollow structure while suppressing the influence of unwanted waves of the transverse mode of the piezoelectric thin film resonator. Provide a filter. A filter including a plurality of piezoelectric thin film resonators S1 to S4 having a piezoelectric film 3 sandwiched between a lower electrode 2 and an upper electrode 4 formed on a substrate, wherein the piezoelectric thin film resonators S1 to S4 are: The outer shapes of the electrode regions 4a to 4d in which the upper electrode 4 and the lower electrode 2 overlap each other include a curved line, and the piezoelectric thin film resonators adjacent to each other among the plurality of piezoelectric thin film resonators S1 to S4 are adjacent electrode regions. The outer shape is a complementary shape. [Selection] Figure 4A
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