http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010059471-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2008-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6518a1411979ac9d55b14c96234595c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066eb237f6ada51a7bbaf0d39f805d78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 |
| publicationDate | 2010-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010059471-A |
| titleOfInvention | Ruthenium fine particles and method for producing the same, and method for producing a metal-containing thin film using ruthenium fine particles as a lower metal film |
| abstract | PROBLEM TO BE SOLVED: To provide a flat continuous metal-containing thin film and a continuous copper-containing thin film having ruthenium fine particles as a lower metal film and a method for producing the same. An object of the present invention is to produce a ruthenium-containing thin film by chemical vapor deposition of an organic ruthenium complex, and then form an organic metal complex on the ruthenium-containing thin film by chemical vapor deposition. The formation of the containing thin film is solved by the ruthenium fine particles characterized in that the ruthenium containing thin film is ruthenium fine particles. [Selection] Figure 1 |
| priorityDate | 2008-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 84.