http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010047474-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B37-02 |
| filingDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_396fafba310706d768782efba84a6efd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04c96fc6d3d80d4317447770c4348e2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6245c3eaf4bad566e1fd04bbfe518211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cec90794fc9bb4f52835d076d34ef733 |
| publicationDate | 2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010047474-A |
| titleOfInvention | Zeolite raw material liquid, zeolite crystal preparation method, zeolite raw material liquid preparation method, and zeolite thin film |
| abstract | [PROBLEMS] To achieve sufficient strength of a zeolite thin film even when a zeolite crystal other than MFI type is a main component, and to realize reduction of dielectric constant, improvement of surface flatness, and improvement of hydrophobicity. Cost reduction is also possible by simplifying the production process. An MEL-type zeolite thin film mainly composed of SiO bonds has an infrared absorption peak at a wave number of 550 cm −1 due to a double five-membered ring structure in the zeolite skeleton. It has surface flatness, a refractive index in the range of 1.07 to 1.14 in the visible light region, and a relative dielectric constant of 2.05 or less at a frequency of 100 kHz. [Selection] Figure 1 |
| priorityDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.