| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2008-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a4910b79664a4f343a01e2cd3451c5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb8271833245e0df62aeec03bd8e22f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39535f00c39dba11a9c5c963de689c14 |
| publicationDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010045091-A |
| titleOfInvention |
Laminated body of protective film and die attach film |
| abstract |
An object of the present invention is to provide a highly reliable laminate having excellent adhesion between a protective film formed on a wafer and a die attach film. A laminate of a protective film and a die attach film formed on a wafer, wherein the protective film is formed of a resin composition containing two or more resins having different etching rates. A laminate having a surface subjected to plasma treatment using a reactive gas. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016133074-A1 |
| priorityDate |
2008-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |