http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010041024-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_957ef0b677d29ee7a61ef8c0af8d1d30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5042269901ae1617f6c21dc1d254d94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_185a59569550cc953146c98b8101ca54 |
| publicationDate | 2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010041024-A |
| titleOfInvention | Chemical mechanical polishing aqueous dispersion, method for producing the same, and chemical mechanical polishing method |
| abstract | An aqueous dispersion for chemical mechanical polishing that has high storage stability of silica particles, realizes a high polishing rate for a barrier metal film without causing defects in a metal film or an insulating film, and has less metal contamination of a wafer, And a chemical mechanical polishing method using the same. An aqueous dispersion for chemical mechanical polishing according to the present invention is an aqueous dispersion for chemical mechanical polishing containing (A) silica particles and (B) an organic acid having two or more carboxyl groups. The (A) silica particles have the following chemical properties. Sodium, potassium and ammonium ion content measured from elemental analysis by ICP emission spectrometry or ICP mass spectrometry and quantitative analysis of ammonium ion by ion chromatography, sodium content: 5 to 500 ppm, potassium and ammonium ion The content of at least one selected from: satisfies the relationship of 100 to 20000 ppm. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021095412-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10435587-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6892033-B1 |
| priorityDate | 2008-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.