http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010039052-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F299-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
filingDate | 2008-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05e71c093fd0d37058d0d932b7983756 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a62e8083c762fe9777537cc5b49ac1a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81ac6b5cd2828362eee659894a0765c9 |
publicationDate | 2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2010039052-A |
titleOfInvention | Photosensitive composition and method for producing pattern film |
abstract | When forming a pattern film made of a cured product of a photosensitive composition by exposure and development, it is not necessary to perform a baking process after exposure, and metal migration is performed when a metal is in contact with the pattern film. Provided are a photosensitive composition that can be suppressed, and a method for producing a patterned film using the photosensitive composition. A photosensitive composition containing a siloxane polymer having a carboxyl group, a compound having an olefin double bond, and a photoradical generator, and the photosensitive composition are coated on a substrate 2, and the substrate 2 is coated. After the photosensitive composition layer 1 is formed on the photosensitive composition layer 1, the photosensitive composition layer 1 is partially exposed to cure the photosensitive composition layer 1 in the exposed portion 1a and make it insoluble in a developer. A method of producing a patterned film 1A, in which the photosensitive composition layer 1 is developed with a developer to remove the photosensitive composition layer 1 in the unexposed portion 1b. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190070870-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012212114-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013147028-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190070869-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014222367-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013213864-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012082393-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013031985-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015067733-A |
priorityDate | 2008-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 385.