| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b64ca2be1fccb81cb67000a672d396e9 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_721665cf51111a3c0963b69f87ce61f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae217a094032f71ce19e6cff87e9f681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28f357d61e44bdc56ebc3d71d41fefef |
| publicationDate |
2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010039004-A |
| titleOfInvention |
Stage apparatus, exposure apparatus, and stage control method |
| abstract |
A substrate and a mask are synchronously moved with high accuracy and high speed. A first two-degree-of-freedom control system including a feedforward control unit and a feedback control unit for controlling a position of a plate stage, a feedforward control unit for controlling a position of a mask stage and a feedback. And a second two-degree-of-freedom control system 200 comprising a control unit 203. The second two-degree-of-freedom control system 200 performs control based on the position of the plate stage PST, and the feedforward control units 102 and 202 are , Complete tracking control. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9952420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010266760-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014218499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103984361-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103984361-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004990-B2 |
| priorityDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |