| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28346a98c16ce4c64f99e1e2b88f2cab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8382f19a5bb23f13b53ac198ffadc45b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39e7c2477a68e95ac2718cc9e5d715bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c5d56c6c033d9fd7b104c7056105aba |
| publicationDate |
2010-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010034581-A |
| titleOfInvention |
Aqueous dispersion for chemical mechanical polishing |
| abstract |
To provide an aqueous dispersion for chemical mechanical polishing capable of suppressing erosion during overpolishing and its speed in a chemical mechanical polishing step. The chemical mechanical polishing aqueous dispersion of the present invention contains abrasive grains, water, and potassium dodecylbenzenesulfonate and / or ammonium dodecylbenzenesulfonate. [Selection figure] None |
| priorityDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |