| abstract |
PROBLEM TO BE SOLVED: To provide a Co-Fe-Ni alloy used as a soft magnetic layer film in a perpendicular magnetic recording medium and a sputtering target material using the same. SOLUTION: Atomic%, Fe: 10 to 45%, Ni: 1 to 25%, one or more of Zr, Hf, Nb, Ta, and B are Zr + Hf + Nb + Ta + B / 2: 5 to 10%, ( However, B is 0% or more and 7% or less), and one or two of Al and Cr are composed of Al + Cr: 0 to 5%, the balance of 37% or more of Co and unavoidable impurities, and the atomic ratio is Fe / Cr. An alloy for a soft magnetic film layer in a perpendicular magnetic recording medium characterized by satisfying (Co + Fe + Ni): 0.10 to 0.50 and Ni / (Co + Fe + Ni): 0.01 to 0.25, and for forming the film Sputtering target material and manufacturing method thereof. [Selection figure] None |