http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010003792-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7839ecd03a6dfc98a65e7eb036d5a8d4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate | 2008-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44aa7d48e6c7850bcf1d472ed7793c4c |
| publicationDate | 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010003792-A |
| titleOfInvention | Excimer laser equipment |
| abstract | An excimer laser device capable of realizing a pumped state with a uniform density in the length direction and capable of continuous oscillation is provided. An excimer laser device according to an aspect of the present invention includes a slab type carbon dioxide laser oscillator, a laser resonator filled with excimer gas on an optical axis, and the light from a direction substantially orthogonal to the optical axis. A cylindrical lens 11 that linearly condenses the laser light from the slab type carbon dioxide laser 10 is provided along the axis. Excimer gas is allowed to flow in a direction substantially orthogonal to the optical axis and the laser beam from the slab type carbon dioxide laser oscillator 10. [Selection] Figure 1 |
| priorityDate | 2008-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.