| abstract |
A test system, apparatus, and method for providing a high current test stimulus to a wafer and chip form semiconductor device (4, 10, 20) includes a plurality of probes (2) electrically coupled to each contact point (3) in the semiconductor device. And a plurality of current limiters (5) electrically coupled to each of the plurality of probes (2), and a current sensor (6) electrically coupled to the plurality of probes. The current limiter (5) limits the current flowing through each probe (2), and the current sensor sends a signal if any contact of the multiple probes exceeds the threshold level. |