http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009526734-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01M2200-012 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01M1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01M1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-24 |
| filingDate | 2007-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009526734-A |
| titleOfInvention | Method for producing polycrystalline silicon using fluidized bed reactor |
| abstract | The present invention includes (a) a reaction tube, (b) a reactor shell surrounding the reaction tube, (c) an internal region formed in the reaction tube where a silicon particle layer is formed and silicon deposition occurs, and an inert gas atmosphere. The outer region formed between the reactor shell and the reaction tube maintained underneath, and (d) the pressure difference between the inner region and the outer region is in the range of 0 bar or more and 1 bar or less A fluidized bed capable of maintaining the physical stability of the reaction tube even under relatively high reaction pressures and efficiently producing granular polycrystalline silicon. The present invention relates to a method for mass production of granular polycrystalline silicon in a reactor. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018536610-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015151281-A |
| priorityDate | 2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.