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publicationDate 2009-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009524065-A
titleOfInvention Self-excited and self-detecting piezoelectric cantilever sensor
abstract A piezoelectric cantilever sensor includes a piezoelectric layer and a non-piezoelectric layer, a portion of which is attached to the piezoelectric layer. In one aspect, one end of the non-piezoelectric layer extends beyond the end of the piezoelectric layer to provide an overhang. Overhang piezoelectric cantilever sensors can increase sensitivity, allowing devices to be applied in more viscous environments, such as liquid media, and at higher flow rates in liquid media than traditional piezoelectric cantilevers. is there. In other aspects, the sensor includes first and second bases, and at least one of the piezoelectric and non-piezoelectric layers is secured to each of the first and second bases to form a piezoelectric cantilever sensor. In this embodiment, the sensor is robust and exhibits excellent detection characteristics in both gaseous and liquid media, even at relatively high flow rates.
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