| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-0013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-0004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2006-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009522780-A |
| titleOfInvention |
Method and system for using a two-phase substrate cleaning compound |
| abstract |
Method and system for using a two-phase substrate cleaning compound United States Patent Application 20070228735 Kind Code: A1 A cleaning compound, apparatus, and method are provided for removing contaminants from a substrate surface. An exemplary cleaning compound for removing particulate contaminants from the surface of a semiconductor substrate is provided. The cleaning compound comprises a viscous liquid having a viscosity between about 1 cP and about 10,000 cP. The cleaning compound also includes a plurality of solid components dispersed in the viscous liquid, the plurality of solid components interacting with the particulate contaminants on the substrate surface to remove the particulate contaminants from the substrate surface. Works. [Selection] Figure 1E |
| priorityDate |
2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |