http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009287088-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_828d9f644ce7f7c25a2032f01f596e45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5433e54b610893f117f36918514e46ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40d50e9497f5b3efc105b03a20e0a41a |
| publicationDate | 2009-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009287088-A |
| titleOfInvention | Film forming apparatus, film forming method, and barrier film |
| abstract | A film forming apparatus, a film forming method, and a barrier film capable of forming a transparent film having good film quality and smoothness are provided. The film forming method of the present invention supplies a sputtering gas and a reactive gas, applies a current to the metal target at a first current value, and covers the surface of the metal target with a compound. The discharge voltage when a film is formed by applying the first current value or the first power to a is defined as a (V), and the discharge is detected by applying the first current value or the first power to the metal target. When the voltage of the metal target is measured, the reactive gas supply amount is changed so that this voltage becomes a predetermined voltage, and the film is formed at each voltage. The visible light of the film obtained at the discharge voltage a (V) When the transmittance in the region is 100% and the voltage at which a film having a transmittance of 85% is obtained is the discharge voltage b (V), the voltage γ of the metal target is (b−a) × 0.5 + a ≦ γ ≦ (b−a) × 0.95 + a . [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101892462-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014189827-A |
| priorityDate | 2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.