http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009283749-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate | 2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10941373b6a864097266d70055b7c335 |
| publicationDate | 2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009283749-A |
| titleOfInvention | Semiconductor device and method for producing semiconductor device |
| abstract | An object of the present invention is to provide a method for efficiently repairing a region where a defect is generated in a single crystal semiconductor layer and forming a single crystal semiconductor layer over a supporting substrate without impairing the transistor characteristics of the region. After forming a single crystal semiconductor layer over a supporting substrate, a defect region generated in the single crystal semiconductor layer is detected by optical means, and a non-single crystal semiconductor is formed on the single crystal semiconductor layer and in the defect region. Forming a crystalline semiconductor layer by selectively crystallizing a non-single crystalline semiconductor layer in the defective region based on the information on the defective region and circuit design information, and forming the crystalline semiconductor layer, Alternatively, a process for forming a semiconductor element including the single crystal semiconductor layer is performed. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017034285-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012160648-A |
| priorityDate | 2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.