| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2008-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ffe53f638eec2a80b39615c3468bfb9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f1784d8d5536c8f0a015741a46eecbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94cedf82f9dd732182f85b85735c22f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c64bf1e627002819df6a4a811220b667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0747439fb0500fd6c809d647807b7ebb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da70f0ee751771143f8486e137fe5bfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_022dd828ba016d1a6cf5f126c039007a |
| publicationDate |
2009-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009276614-A |
| titleOfInvention |
Positive resist composition, resist pattern forming method, and polymer compound |
| abstract |
Provided are a novel polymer compound, a positive resist composition containing the polymer compound, and a resist pattern forming method using the positive resist composition. A base material component (A) whose solubility in an alkaline developer is increased by the action of an acid and an acid generator component (B) which generates an acid upon exposure are contained, and the base material component (A) is represented by the formula A positive resist composition comprising a polymer compound (A1) having a structural unit (a011) represented by (a0-11) and a structural unit (a012) represented by formula (a0-12). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020192223-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011123143-A |
| priorityDate |
2008-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |